A
device that precisely meters the flow of tiny amounts of fluid. Precise
control of the flow restriction is accomplished by deflecting a highly
polished cantilevered plate. The opening is adjustable on a sub-nanometer scale, limited by the roughness of the
polished plates. Thus, the Nanogate is an Ultra Surface Finish Effect
Mechanism (USFEM). The Nanogate can be fabricated on a macro-, meso- or
micro- (mems) scale. [James R. White]
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