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Elastic
Recoil Detection is a nuclear technique in materials science to obtain elemental
concentration depth profiles in thin
films. An energetic ion beam is directed at the sample to be depth
profiled and (as in Rutherford backscattering) there is an elastic
nuclear interaction with the atoms of
the sample. The incident energetic ions typically have mev of energy, enough to kick out (recoil) the atoms being struck. The technique depends on putting in
an appropriate detector to detect these recoiled atoms.
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