Ellipsometry

 

A technique used to optically characterize material types such as semiconductors, dielectrics, metals, organic polymers and plastics in thin films, thin films stacks and in nanostructures. Ellipsometry does not contact or damage samples, and is an ideal and precise measurement technique for determining optical and, hence, physical and chemical properties of materials at the nanoscale. It is most commonly used to accurately measure film thickness and optical properties.

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Polarimetry

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