Focused Ion Beam

 

Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor and materials science fields for site-specific analysis, deposition, and ablation of materials.

Source

Beam of ions (usually gallium) focused through a set of electrostatic lenses to create a small spot on a substrate

Source

 

 

 

 

 

 

 

 

 


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Refer to this page:

Secondary Ion Mass Spectrometry

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