Ion Beam Analysis

 

Ion beam analysis ("IBA") is an important family of modern analytical techniques involving the use of mev ion beams to probe the composition and obtain elemental depth profiles in the near-surface layer of solids. All IBA methods are highly sensitive and allow the detection of elements in the sub-monolayer range. The depth resolution is typically in the range of a few nanometers to a few ten nanometers. Atomic depth resolution can be achieved, but requires special equipment. The analyzed depth ranges from a few ten nanometers to a few ten micrometers. IBA methods are always quantitative with an accuracy of a few percent. Channeling allows to determine the depth profile of damage in single crystals.

Source

Ion beam analysis ("IBA") is an important family of modern analytical techniques involving the use of mev ion beams to probe the composition and obtain elemental depth profiles in the near-surface layer of solids. All IBA methods are highly sensitive and allow the detection of elements in the sub-monolayer range. The depth resolution is typically in the range of a few nanometers to a few ten nanometers. Atomic depth resolution can be achieved, but requires special equipment. The analyzed depth ranges from a few ten nanometers to a few ten micrometers. IBA methods are always quantitative with an accuracy of a few percent. Channeling allows to determine the depth profile of damage in single crystals.

Source

Method to elucidate composition and structure of the outermost atomic layers of a solid material, in which principally monoenergetic, singly-charged probe ions, scattered from the surface, are detected and recorded as a function of their energy or angle of scattering, or both

Source

Method to elucidate composition and structure of the outermost atomic layers of a solid material, in which principally mono-energetic, singly charged probe ions, scattered from the surface are detected and recorded as a function of their energy or angle of scattering, or both

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