Ion
beam analysis ("IBA") is an important family of modern analytical
techniques involving the use of mev ion beams to
probe the composition and obtain elemental depth profiles in the near-surface
layer of solids. All IBA methods are highly sensitive and allow the detection
of elements in the sub-monolayer range. The depth resolution is typically in the range of a few nanometers to a few ten nanometers.
Atomic depth resolution can be achieved, but requires special
equipment. The analyzed depth ranges from a few ten nanometers
to a few ten micrometers. IBA methods are always quantitative with an
accuracy of a few percent. Channeling allows to determine the depth profile
of damage in single crystals.
Ion
beam analysis ("IBA") is an important family of modern analytical
techniques involving the use of mev ion beams to
probe the composition and obtain elemental depth profiles in the near-surface
layer of solids. All IBA methods are highly sensitive and allow the detection
of elements in the sub-monolayer range. The depth resolution is typically in the range of a few nanometers to a few ten nanometers.
Atomic depth resolution can be achieved, but requires special
equipment. The analyzed depth ranges from a few ten nanometers
to a few ten micrometers. IBA methods are always quantitative with an
accuracy of a few percent. Channeling allows to determine the depth profile
of damage in single crystals.
Method
to elucidate composition and structure of the outermost atomic layers of a
solid material, in which principally monoenergetic,
singly-charged probe ions, scattered from the surface, are detected and
recorded as a function of their energy
or angle of scattering, or both
Method
to elucidate composition and structure of the outermost atomic layers of a
solid material, in which principally mono-energetic, singly charged probe
ions, scattered from the surface are detected and recorded as a function of
their energy
or angle of scattering, or both
