Scanning
capacitance microscopy (SCM) is a variety of scanning probe microscopy in
which a narrow probe electrode is held just above the surface of a sample and
scanned across the sample. SCM characterizes the surface of the sample using
information obtained from the change in electrostatic capacitance between the
surface and the probe.
Distinct
operation mode of an AFM, where local differences in the surface capacity are
recorded. The probe is scanning at a certain height with a modulated voltage
applied simultaneously.
