Method
in which an electron
spectrometer is used to measure the energy
distribution of photoelectrons and Auger electrons emitted from a surface
irradiated by x-ray photons
Method
in which an electron
spectrometer is used to measure the energy
distribution of Auger and photoelectrons emitted from a surface irradiated by
X-ray photons
Method
in which an electron
spectrometer is used to measure the energy
distribution of photoelectrons and Auger electrons emitted from a surface
irradiated by x-ray photons
Investigation
of electrons
emitted from a sample surface by illuminating with x-rays (photo electric
effect). XPS provides chemical information through the kinetic energy of the detected electrons
and information about the chemical bond
which was involved. Lateral resolution can be achieved with a scanning x-ray
source. ESCA (Electron
spectroscopy for chemical analysis) is a synonym for XPS.
