(microelectromechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches as well as accelerometers for airbags, vehicle control, pacemakers and games. The technology is also used to make inkjet print heads, microactuators for read/write heads and all-optical switches that reflect light beams to the appropriate output port.

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Microelectromechanical Systems

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Technology used to integrate various electro-mechanical functions onto integrated circuits. A typical MEMS device combines a sensor and logic to perform a monitoring function. Examples include sensing devices used to control the deployment of airbags in cars and switching devices used in optical telecommunications cables.

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Acronym for Micro Electro Mechanical Systems. Refers to a technology used to integrate various electro-mechanical functions onto integrated circuits. A typical MEMS device combines a sensor and a control logic to perform a monitoring function. Examples include sensing devices used to control the deployment of airbags in cars and switching devices used in optical telecommunications cables.

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Generic term to describe micron scale electrical/mechanical devices. [zy] see the beauty of mems: simpler, more reliable, cheaper, and cool - small times for a great description and examples of use.

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A mechanical system or machine that exists at the micro-level

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Microelectromechanical Systems

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Technology used to integrate various electro-mechanical functions onto integrated circuits. A typical MEMS device combines a sensor and logic to perform a monitoring function. Examples include sensing devices used to control the deployment of airbags in cars and switching devices used in optical telecommunications cables.

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MEMS generic term to describe micron scale electrical/mechanical devices. [ZY] See The beauty of MEMS: Simpler, more reliable, cheaper, and cool - Small Times for a great description and examples of use.

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The fabrication or micro-machining of materials to make stationary and moving structures, devices and systems of a nominal size scale from a few centimeters to a few micrometers.

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Microelectromechanical systems. A term primarily used in the United States, it refers to machines with moving parts smaller than a human hair that contain both electrical and mechanical components on silicon. Also referred to as Microsystems, microstructures, microstructure technology (MST) and mechatronics.

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