Electron-beam-induced deposition

 

Electrons are focused on a surface of adsorbed procursor gas molecules. Inelastic collisions generate secondary electrons in the substarte that are re-emitted and dissociate precursor molecules. Nonvolatile products adhere to the surface, and a deposit grows. EBID has sub-10nm resolution.

Source


___________________

Refer to this page:

___________________

Related Terms:

 

Note: If a company/institute/site doesn't want to present its own information in nanodic.com, it can sent one e-mail to info@nanodic.com.