Nanolithography

 

Nanolithography refers to the fabrication of nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. Nanolithography is used during the fabrication of leading-edge semiconductor integrated circuits or nanoelectromechanical systems (NEMS).

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Nanolithography refers to the fabrication of nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. Nanolithography is used during the fabrication of leading-edge semiconductor integrated circuits or nanoelectromechanical systems (NEMS). As of 2007, nanolithography is a very active area of research in academia and in industry.

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Photolithography on the nanoscale.

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Dip pen nanolithography

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Writing nanoscale patterns. See Lithography.

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Writing on the nanoscale. From the Greek words Nanos - Dwarf, Lithos - rock, and grapho - to write, this word literally means "small writing on rocks." [NTN] see Optical Near-Field Lithography

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Nanolithography is the art and science of etching, writing, or printing at the microscopic level, where the dimensions of characters are on the order of nanometers. This includes various methods of modifying semiconductor chips at the atomic level for the purpose of fabricating integrated circuits (ics). Instruments used in nanolithography include the scanning tunnelling microscope (STM) and the atomic force microscope (AFM). Both allow surface viewing in fine detail without necessarily modifying it. Either the STM or the AFM can be used to etch, write, or print on a surface in single-atom dimensions.

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Nanolithography is the art and science of etching, writing, or printing at the nanoscopic level, where the dimensions of characters are on the order of nanometers. This includes various methods of modifying semiconductor chips at the atomic level for the purpose of fabricating integrated circuits (ics). Instruments used in nanolithography include the scanning tunneling microscope (STM) and the atomic force microscope (AFM). Both allow surface viewing in fine detail without necessarily modifying it. Either the STM or the AFM can be used to etch, write, or print on a surface in single-atom dimensions.

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Writing on the nanoscale. From the Greek words Nanos - Dwarf, Lithos - rock, and grapho - to write, this word literally means "small writing on rocks." [NTN] see Optical Near-Field Lithography

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Nanolithography is the art and science of etching, writing, or printing at the microscopic level, where the dimensions of characters are on the order of nanometers. This includes various methods of modifying semiconductor chips at the atomic level for the purpose of fabricating integrated circuits (ics). Instruments used in nanolithography include the scanning tunnelling microscope (STM) and the atomic force microscope (AFM). Both allow surface viewing in fine detail without necessarily modifying it. Either the STM or the AFM can be used to etch, write, or print on a surface in single-atom dimensions.

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Writing on the nanoscale.

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Refer to this page:

Electron Transport

Lithography

Nanoimprint Lithography

Numerical modeling

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Related Terms:

 

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