Scanning Probe Nanolithography

 

The suite of techniques for patterning self-assembled monolayers using atomic force microscopy, scanning tunneling microscopy or associated techniques.

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Generic name for lithographic techniques based on scanning probe microscopes. This can be a scanning tunneling microscope (STM) and the associated lithography is based on a pulsed bias voltage or an atomic force microscope (AFM) combined with a force or voltage based surface modifying technique for example.

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