soft lithography refers to a family of techniques for
fabricating or replicating structures using "elastomeric stamps, molds,
and conformable photomasks" (in the words of Rogers and Nuzzo, p. 50, as
cited in "References"). It is called "soft" because it
uses elastomeric materials most notably PDMS. Soft lithography is generally used to construct
features measured on the micrometer to nanometer
scale. According to Rogers and Nuzzo (2005), development of soft lithography expanded rapidly during the period
1995 to 2005.