X-Ray Lithography

 

X-ray lithography is a next generation lithography that has been developed for the semiconductor industry. Batches of microprocessors have already been produced.

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X-ray lithography is a next generation lithography that has been developed for the semiconductor industry[1]. Batches of microprocessors have already been produced.

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X-ray lithography can be extended to an optical resolution of 15 nm by using the short wavelengths of 1 nm for the illumination. This is implemented by the proximity printing approach.

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